JPH01113330U - - Google Patents
Info
- Publication number
- JPH01113330U JPH01113330U JP763588U JP763588U JPH01113330U JP H01113330 U JPH01113330 U JP H01113330U JP 763588 U JP763588 U JP 763588U JP 763588 U JP763588 U JP 763588U JP H01113330 U JPH01113330 U JP H01113330U
- Authority
- JP
- Japan
- Prior art keywords
- protrusions
- wafer support
- wafer
- pillars
- disks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP763588U JPH069489Y2 (ja) | 1988-01-26 | 1988-01-26 | ウエハ支持具の載置台 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP763588U JPH069489Y2 (ja) | 1988-01-26 | 1988-01-26 | ウエハ支持具の載置台 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113330U true JPH01113330U (en]) | 1989-07-31 |
| JPH069489Y2 JPH069489Y2 (ja) | 1994-03-09 |
Family
ID=31212811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP763588U Expired - Lifetime JPH069489Y2 (ja) | 1988-01-26 | 1988-01-26 | ウエハ支持具の載置台 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069489Y2 (en]) |
-
1988
- 1988-01-26 JP JP763588U patent/JPH069489Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069489Y2 (ja) | 1994-03-09 |